Complex Electron Heating in Capacitive Multi-Frequency...

IEEE Transactions on Plasma Science 2014 / 10 Vol. 42; Iss. 10

Complex Electron Heating in Capacitive Multi-Frequency Plasmas

Schulze, Julian, Schungel, Edmund, Derzsi, Aranka, Korolov, Ihor, Mussenbrock, Thomas, Donko, Zoltan
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Volume:
42
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2014.2306265
Date:
October, 2014
File:
PDF, 481 KB
english, 2014
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