The plasma oxidation of CF4 in a tubular-alumina fast-flow...

The plasma oxidation of CF4 in a tubular-alumina fast-flow reactor

Smolinsky, G., Flamm, D. L.
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Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.325576
File:
PDF, 693 KB
english, 1979
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