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Accurate Load Detection Based on a New Piezoelectric Drive Principle Employing Phase-Shift Measurement
Wallenhauer, Carsten, Gottlieb, Bernhard, Kappel, Andreas, Schwebel, Tim, Rucha, Johannes, Luth, TimVolume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.889536
Date:
April, 2007
File:
PDF, 1.16 MB
english, 2007