Effect of Delta Doping in a-SiN:H Thin Film on the Mobility...

Molecular Crystals and Liquid Crystals 2009 / 11 Vol. 514; Iss. 1

Effect of Delta Doping in a-SiN:H Thin Film on the Mobility of Thin Film Transistors

Jung, Hun-Chul, Park, Kwang-Mook, Moon, Kyo-Ho, Lee, Tae-Yong, Choi, Sie-Young
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Volume:
514
Language:
english
Journal:
Molecular Crystals and Liquid Crystals
DOI:
10.1080/15421400903240977
Date:
November, 2009
File:
PDF, 437 KB
english, 2009
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