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[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Structural characterization of zinc oxide thin films deposited at various O2/Ar flow ratio in magnetron sputtering plasma
Nayan, Nafarizal, Shuhana, C. T., Ahmad, Riyaz, Sahdan, Mohd Zainizan, Ahmad, Mohd Khairul, Fhong, Soon Chin, Saim, Hashim, Zain, Ahmad Faizal Mohd, Zakaria, Ammar, Shakaff, Ali Yeon MdYear:
2013
Language:
english
DOI:
10.1109/rsm.2013.6706510
File:
PDF, 325 KB
english, 2013