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[IEEE International Electron Devices Meeting 1998. Technical Digest - San Francisco, CA, USA (6-9 Dec. 1998)] International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) - Trench oxide isolated single crystal silicon micromachined accelerometer
Sridhar, U., Lau Choon How,, Liu Lian Jun,, Miao Yu Bo,, Tan Khen-Sang,, Foo Pang Dow,, Bergstrom, J., Sooriakumar, K., Loh Yong Hong,, Lee Han San,, Tan Chung Kiat,Year:
1998
Language:
english
DOI:
10.1109/iedm.1998.746401
File:
PDF, 736 KB
english, 1998