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[IEEE Proceedings of the IEEE 2006 International Interconnect Technology Conference - Burlingame, CA (2006.06.5-2006.06.7)] 2006 International Interconnect Technology Conference - UV Curing Effects on Glass Structure and Mechanical Properties of Organosilicate Low-k Thin Films
Gage, D.M., Guyer, E.P., Stebbins, J.F., Zhenjiang Cui,, Amir Al-Bayati,, Demos, A., MacWilliams, K.P., Dauskardt, R.H.Year:
2006
Language:
english
DOI:
10.1109/iitc.2006.1648673
File:
PDF, 379 KB
english, 2006