![](/img/cover-not-exists.png)
Plasma Grown Oxy-Nitride Films for Silicon Surface Passivation
Saseendran, Sandeep S., Kottantharayil, AnilVolume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2263331
Date:
July, 2013
File:
PDF, 360 KB
english, 2013