Plasma Grown Oxy-Nitride Films for Silicon Surface...

IEEE Electron Device Letters 2013 / 07 Vol. 34; Iss. 7

Plasma Grown Oxy-Nitride Films for Silicon Surface Passivation

Saseendran, Sandeep S., Kottantharayil, Anil
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2263331
Date:
July, 2013
File:
PDF, 360 KB
english, 2013
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