[IEEE 2009 International Semiconductor Conference (CAS 2009) - Sinaia, Romania (2009.10.12-2009.10.14)] 2009 International Semiconductor Conference - Optimization issues regarding microcantilever design and fabrication
Ion, M., Moldovan, C., Iosub, R., Brasoveanu, C.Year:
2009
Language:
english
DOI:
10.1109/smicnd.2009.5336650
File:
PDF, 850 KB
english, 2009