[IEEE 2006 14th International Conference on Advanced Thermal Processing of Semiconductors - Kyoto (2006.10.10-2006.10.13)] 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Low Thermal Budget Activation of B in Si
Bourdon, H., Halimaoui, A., Talbot, A., Venturini, J., Marcelot, O., Dutartre, D.Year:
2006
Language:
english
DOI:
10.1109/rtp.2006.368001
File:
PDF, 1.49 MB
english, 2006