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Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films
Gaspar, J., Chu, V., Conde, J.P.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851808
Date:
October, 2005
File:
PDF, 705 KB
english, 2005