[IEEE 2004 IEEE International SOI Conference - Charleston,...

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[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - Transfer of patterned Si and SiO/sub 2/ layers for the fabrication of patterned and mixed SOI

Moriceau, H., Yalicheff, C., Gorla, C., Charvet, A.M., Morales, C., Zussy, M., Dechamp, J., Kernevez, N., Letertre, F., Ghyselen, B., Mazure, C., Lagahe-Blanchard, C., Aspar, B.
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Year:
2004
Language:
english
DOI:
10.1109/soi.2004.1391617
File:
PDF, 180 KB
english, 2004
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