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Special Issue on HiPIMS and High Power Glow Discharge
Yukimura, Ken, Ehiasarian, Arutiun P.Volume:
38
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2010.2073131
Date:
November, 2010
File:
PDF, 81 KB
english, 2010