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Microelectromechanical vibration sensor with optical interconnects
Peiner, E., Scholz, D., Fricke, K., Schlachetzki, A., Hauptmann, P.Volume:
7
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.661384
Date:
March, 1998
File:
PDF, 137 KB
english, 1998