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Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs
Vorobiev, Andrei, Gevorgian, SpartakVolume:
61
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/tuffc.2014.2975
Date:
May, 2014
File:
PDF, 3.04 MB
english, 2014