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Effects of electron-beam irradiation and substrate temperature on the physical properties of evaporated a-Si:C thin films
Audas, R. D., Moore, C. J. L., Sturtevant, T. E. W., Johnson, G. W., Leslie, J. D., Brodie, D. E.Volume:
63
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p85-135
Date:
June, 1985
File:
PDF, 291 KB
english, 1985