[IEEE 2011 IEEE International Conference on Mechatronics and Automation (ICMA) - Beijing, China (2011.08.7-2011.08.10)] 2011 IEEE International Conference on Mechatronics and Automation - Towards automated AFM-based nanomanipulation in a combined nanorobotic AFM/HRSEM/FIB system
Bartenwerfer, M., Fatikow, S., Tunnell, R., Mick, U., Stolle, C., Diederichs, C., Jasper, D., Eichhorn, V.Year:
2011
Language:
english
DOI:
10.1109/icma.2011.5985651
File:
PDF, 166 KB
english, 2011