Micro- to Nanostructured Devices for the Characterization...

Journal of Microelectromechanical Systems 2010 / 10 Vol. 19; Iss. 5

Micro- to Nanostructured Devices for the Characterization of Scaling Effects in Shape-Memory Thin Films

Konig, Dennis, Ehmann, Michael, Thienhaus, Sigurd, Ludwig, Alfred
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2067441
Date:
October, 2010
File:
PDF, 606 KB
english, 2010
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