[IEEE 2004 Semiconductor Manufacturing Technology Workshop...

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[IEEE 2004 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (9-10 Sept. 2004)] 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) - A study of the fabrication of flip-chip bumps using dry-film photoresist process on 300 mm wafer

Zhi-Ting Ke,, Cheng-Shih Lee,, Keng-Huei Shen,, Chang, E.Y.
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Year:
2004
Language:
english
DOI:
10.1109/smtw.2004.1393724
File:
PDF, 293 KB
english, 2004
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