[IEEE 2011 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2011) - Incheon, Korea (South) (2011.07.4-2011.07.7)] 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Nanoscale thermally induced strain and stress analysis by complementary Scanning Thermal Microscopy Techniques
Fakhri, M., Geinzer, A.-K., Heiderhoff, R., Balk, L.J.Year:
2011
Language:
english
DOI:
10.1109/ipfa.2011.5992792
File:
PDF, 256 KB
english, 2011