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[IEEE 2009 IEEE 9th International Conference on the Properties and Applications of Dielectric Materials (ICPADM) - Harbin, China (2009.07.19-2009.07.23)] 2009 IEEE 9th International Conference on the Properties and Applications of Dielectric Materials - Study on the impact of chemical composition of contamination on optical monitor equipment
Hengzhen Li,, Gang Liu,, Yigang Liu,Year:
2009
Language:
english
DOI:
10.1109/icpadm.2009.5252437
File:
PDF, 9.52 MB
english, 2009