Multi-Zone Thermal Processing in Semiconductor...

IEEE Transactions on Industrial Informatics 2010 / 05 Vol. 6; Iss. 2

Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation

Han Yan,, Weng Khuen Ho,, Keck Voon Ling,, Khiang Wee Lim,
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Volume:
6
Language:
english
Journal:
IEEE Transactions on Industrial Informatics
DOI:
10.1109/tii.2010.2040285
Date:
May, 2010
File:
PDF, 1.17 MB
english, 2010
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