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[IEEE 2008 10th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2008.12.9-2008.12.12)] 2008 10th Electronics Packaging Technology Conference - Measurement of Leak Rate for MEMS Vacuum Packaging
Gan, Zhiyin, Huang, Dexiu, Wang, Xuefang, Lin, Dong, Liu, ShengYear:
2008
Language:
english
DOI:
10.1109/eptc.2008.4763523
File:
PDF, 5.37 MB
english, 2008