![](/img/cover-not-exists.png)
[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Two-wavelength Grating Interferometry for Extended Range MEMS Metrology
Toy, M. F., Ferhanoglu, O., Urey, H.Year:
2007
Language:
english
DOI:
10.1109/omems.2007.4373857
File:
PDF, 315 KB
english, 2007