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Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer
Sasaki, Takashi, Hane, KazuhiroVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2189936
Date:
August, 2012
File:
PDF, 1.44 MB
english, 2012