Precise Grating Profile Evaluation for DFB Lasers Using an Optical Metrology
Muroya, Yoshiharu, Makino, Shingo, Umeda, Naoki, Okuda, Tetsuro, Ishikawa, Shin, Komatsu, KeiroVolume:
20
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2007.901402
Date:
August, 2007
File:
PDF, 1.10 MB
english, 2007