[IEEE 1st International Symposium on Plasma Process-Induced...

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[IEEE 1st International Symposium on Plasma Process-Induced Damage - Santa Clara, CA (13-14 May 1996)] Proceedings of 1st International Symposium on Plasma Process-Induced Damage - Prediction of Plasma Charging Induced Gate Oxide Tunneling Current and Antenna Dependence by Plasma Charging Probe

Shawming Ma,, Mcvittie, J.P.
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Year:
1996
Language:
english
DOI:
10.1109/ppid.1996.715194
File:
PDF, 415 KB
english, 1996
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