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[IEEE 2012 1st International Symposium on Physics and Technology of Sensors (ISPTS) - Pune, India (2012.03.7-2012.03.10)] 2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1) - Optimization of poly (methyl methacrylate) as sacrificial layer for application in low temperature MEMS

Kshirsagar, Abhijeet, Duttagupta, S. P., Gangal, S. A.
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Year:
2012
Language:
english
DOI:
10.1109/ispts.2012.6260894
File:
PDF, 388 KB
english, 2012
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