[IEEE International Electron Devices Meeting 1999....

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[IEEE International Electron Devices Meeting 1999. Technical Digest - Washington, DC, USA (5-8 Dec. 1999)] International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) - Extending trench DRAM technology to 0.15 μm groundrule and beyond

Rupp, T., Chaudhary, N., Dev, K., Fukuzaki, Y., Gambino, J., Ho, H., Iba, J., Ito, E., Kiewra, E., Kim, B., Maldei, M., Matsunaga, T., Ning, J., Rengarajan, R., Sudo, A., Takagawa, Y., Tobben, D., Wey
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Year:
1999
Language:
english
DOI:
10.1109/iedm.1999.823840
File:
PDF, 919 KB
english, 1999
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