Hydrogenated amorphous silicon films deposited by DC planar...

Superlattices and Microstructures 1987 Vol. 3; Iss. 4

Hydrogenated amorphous silicon films deposited by DC planar magnetron reactive sputtering

Mustafa Pinarbasi, Lih Hsin Chou, Nagi Maley, Alan Myers, David Leet, John A. Thornton
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Volume:
3
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0749-6036(87)90203-5
File:
PDF, 876 KB
english, 1987
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