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[IEEE [1993] Tenth Biennial University/Government/Industry Microelectronics Symposium - Research Triangle Park, NC, USA (18-19 May 1993)] [1993] Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium - Emissivity correcting pyrometer for temperature measurement in low pressure chemical vapor deposition
Fordham, M.J., Gansman, R.F., Sorrell, F.Y.Year:
1993
Language:
english
DOI:
10.1109/ugim.1993.297057
File:
PDF, 504 KB
english, 1993