Excitation Patterns and Heating Mechanisms During E-H-Mode...

IEEE Transactions on Plasma Science 2014 / 10 Vol. 42; Iss. 10

Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges

Wegner, Thomas, Kullig, Christian, Meichsner, Jurgen
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Volume:
42
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2014.2310501
Date:
October, 2014
File:
PDF, 657 KB
english, 2014
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