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Evolution of the surface morphology of AlN epitaxial film by HVPE
Gong, Xiaojing, Xu, Ke, Huang, Jun, Liu, Ting, Ren, Guoqiang, Wang, Jianfeng, Zhang, JicaiVolume:
409
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2014.10.012
Date:
January, 2015
File:
PDF, 1.44 MB
english, 2015