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[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Study of aluminum film deposition on the surface of micro-trench by dual ion beam sputtering
Tsai, Hung-Yin, Kuo, Kei-Lin, Wu, Chih-WeiYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456163
File:
PDF, 1.01 MB
english, 2007