A Novel Nanofabrication Damascene Lift-Off Technique

A Novel Nanofabrication Damascene Lift-Off Technique

Maraghechi, P., Cadien, K., Elezzabi, A. Y.
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Volume:
10
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2010.2081374
Date:
July, 2011
File:
PDF, 477 KB
english, 2011
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