Micromachined resonant temperature sensors: theoretical and...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2000 / 03 Vol. 47; Iss. 2

Micromachined resonant temperature sensors: theoretical and experimental results

Leblois, T.G., Tellier, C.R.
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Volume:
47
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.827417
Date:
March, 2000
File:
PDF, 542 KB
english, 2000
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