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[IEEE 2010 3rd Electronic System-Integration Technology Conference (ESTC) - Berlin, Germany (2010.09.13-2010.09.16)] 3rd Electronics System Integration Technology Conference ESTC - Investigation of nano-patterned PZT thin films by piezoresponse force microscopy
Waegner, M., Haussmann, A., Hoffmann, M., Suchaneck, G., Gerlach, G., Eng, L. M.Year:
2010
Language:
english
DOI:
10.1109/estc.2010.5642928
File:
PDF, 922 KB
english, 2010