Normal-incidence spectroscopic ellipsometry for critical...

Applied Physics Letters 2001 Vol. 78; Iss. 25

Normal-incidence spectroscopic ellipsometry for critical dimension monitoring

Huang, Hsu-Ting, Kong, Wei, Terry, Fred Lewis
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Volume:
78
Year:
2001
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1378807
File:
PDF, 311 KB
english, 2001
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