Effects of an additional magnetic field in ITO thin film...

Ceramics International 2015 / 01 Vol. 41; Iss. 1

Effects of an additional magnetic field in ITO thin film deposition by magnetron sputtering

Chan Heo, Kyong, Sohn, Youngku, Seog Gwag, Jin
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Volume:
41
Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2014.08.111
Date:
January, 2015
File:
PDF, 1.33 MB
english, 2015
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