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Physical self-assembly and the nucleation of three-dimensional nanostructures by oblique angle deposition
Karabacak, T., Wang, G.-C., Lu, T.-M.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1743178
File:
PDF, 1.27 MB
english, 2004