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[IEEE 2012 IEEE International Test Conference (ITC) - Anaheim, CA, USA (2012.11.5-2012.11.8)] 2012 IEEE International Test Conference - Spatial estimation of wafer measurement parameters using Gaussian process models
Kupp, Nathan, Huang, Ke, Carulli, John, Makris, YiorgosYear:
2012
Language:
english
DOI:
10.1109/test.2012.6401545
File:
PDF, 1.81 MB
english, 2012