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[IEEE 2008 17th Biennial University/Government/Industry Micro/Nano Symposium - Louisville, KY, USA (2008.07.13-2008.07.16)] 2008 17th Biennial University/Government/Industry Micro/Nano Symposium - Your Cleanroom as an Outreach Vehicle
Lake, Joseph H., Kieswetter, Ana S., Crain, Mark M., Alphenaar, B. W., Keynton, Robert S., Wilhelm, Mickey R., Walsh, Kevin M.Year:
2008
Language:
english
DOI:
10.1109/ugim.2008.58
File:
PDF, 509 KB
english, 2008