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Structural and electrical resistivity characteristics of vacuum arc ion deposited zirconium nitride thin films
Khan, Shakil, Mehmood, Mazhar, Ahmad, Ishaq, Ali, Farhat, Shah, A.Volume:
30
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2014.10.029
Date:
February, 2015
File:
PDF, 1.34 MB
english, 2015