Deposition of O atomic layers on Si(100) substrates for...

Applied Surface Science 2015 / 01 Vol. 324

Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry

Jayachandran, Suseendran, Delabie, Annelies, Billen, Arne, Dekkers, Harold, Douhard, Bastien, Conard, Thierry, Meersschaut, Johan, Caymax, Matty, Vandervorst, Wilfried, Heyns, Marc
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Volume:
324
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.10.086
Date:
January, 2015
File:
PDF, 1.74 MB
english, 2015
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