Very small critical current spreads in Nb/Al-AlOx/Nb...

Very small critical current spreads in Nb/Al-AlOx/Nb integrated circuits using low-temperature and low-stress ECR PECVD silicon oxide films

Xiaofan Meng,, Bhat, A., van Duzer, T.
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Volume:
9
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/77.783711
Date:
June, 1999
File:
PDF, 401 KB
english, 1999
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