[IEEE 2008 13th International Power Electronics and Motion Control Conference (EPE/PEMC 2008) - Poznan, Poland (2008.09.1-2008.09.3)] 2008 13th International Power Electronics and Motion Control Conference - Identification and control of precision XY stages with active vibration suppression system
Nitta, Mayumi, Seiji Hashimoto,Year:
2008
Language:
english
DOI:
10.1109/epepemc.2008.4635387
File:
PDF, 799 KB
english, 2008