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Structural and Electronic Properties of a Mn Oxide Diffusion Barrier Layer Formed by Chemical Vapor Deposition
Dixit, Vijay Kumar, Neishi, Koji, Akao, Noboru, Koike, JunichiVolume:
11
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2011.2141671
Date:
June, 2011
File:
PDF, 601 KB
english, 2011