New interpolation algorithm for evaluation a spatial...

Review of Scientific Instruments 2010 Vol. 81; Iss. 5

New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges

Oh, Se-Jin, Jang, Sung-Ho, Kim, Young-Cheol, Chung, Chin-Wook
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Volume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3427220
File:
PDF, 880 KB
english, 2010
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