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[IEEE 2012 IEEE 11th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE) - Novosibirsk, Russia (2012.10.2-2012.10.4)] 2012 IEEE 11th International Conference on Actual Problems of Electronics Instrument Engineering (APEIE) - Modeling of the effect of silicon needles sharpening during their thermal oxidation
Kalinin, Sergey V., Egorkin, Andrey V.Year:
2012
Language:
russian
DOI:
10.1109/apeie.2012.6628920
File:
PDF, 346 KB
russian, 2012