[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Design and performance of a 120 kV, 40 kW plasma ion implantation facility
Nikiforov, S.A., Kim, J.H., Shenderey, S.V., Rim, G.H., Kim, J.Year:
2003
Language:
english
DOI:
10.1109/plasma.2003.1228664
File:
PDF, 77 KB
english, 2003